A heater plate assisted integrated bake/chill system for photoresist processing

10.1117/12.711688

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Bibliographic Details
Main Authors:	Chua, H.-T., Tay, A., Wang, Y., Wu, X.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Lithography Mica heater Temperature control Thermoelectric
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73030
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73030
record_format	dspace
spelling	sg-nus-scholar.10635-730302023-10-26T09:28:49Z A heater plate assisted integrated bake/chill system for photoresist processing Chua, H.-T. Tay, A. Wang, Y. Wu, X. MECHANICAL ENGINEERING Lithography Mica heater Temperature control Thermoelectric 10.1117/12.711688 Proceedings of SPIE - The International Society for Optical Engineering 6519 PART 2 - PSISD 2014-06-19T05:30:22Z 2014-06-19T05:30:22Z 2007 Conference Paper Chua, H.-T., Tay, A., Wang, Y., Wu, X. (2007). A heater plate assisted integrated bake/chill system for photoresist processing. Proceedings of SPIE - The International Society for Optical Engineering 6519 (PART 2) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.711688 0819466387 0277786X http://scholarbank.nus.edu.sg/handle/10635/73030 000247395600114 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Lithography Mica heater Temperature control Thermoelectric
spellingShingle	Lithography Mica heater Temperature control Thermoelectric Chua, H.-T. Tay, A. Wang, Y. Wu, X. A heater plate assisted integrated bake/chill system for photoresist processing
description	10.1117/12.711688
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Chua, H.-T. Tay, A. Wang, Y. Wu, X.
format	Conference or Workshop Item
author	Chua, H.-T. Tay, A. Wang, Y. Wu, X.
author_sort	Chua, H.-T.
title	A heater plate assisted integrated bake/chill system for photoresist processing
title_short	A heater plate assisted integrated bake/chill system for photoresist processing
title_full	A heater plate assisted integrated bake/chill system for photoresist processing
title_fullStr	A heater plate assisted integrated bake/chill system for photoresist processing
title_full_unstemmed	A heater plate assisted integrated bake/chill system for photoresist processing
title_sort	heater plate assisted integrated bake/chill system for photoresist processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73030
_version_	1781783271679459328

A heater plate assisted integrated bake/chill system for photoresist processing

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