A heater plate assisted integrated bake/chill system for photoresist processing

• Main Authors: Chua, H.-T., Tay, A., Wang, Y., Wu, X.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Lithography; Mica heater; Temperature control; Thermoelectric
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73030
• Institution: National University of Singapore

10.1117/12.711688