Advanced contact technology for MOSFETs: Integration of new materials for series resistance reduction

Advanced contact technology for MOSFETs: Integration of new materials for series resistance reduction

10.1149/1.3203967

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Bibliographic Details
Main Authors: Yeo, Y.-C., Lee, R.T.-P.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69238
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Institution: National University of Singapore
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Summary:10.1149/1.3203967

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