Characterization techniques for NEMS/MEMS devices
10.1117/12.810798
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sg-nus-scholar.10635-695932024-11-09T07:24:33Z Characterization techniques for NEMS/MEMS devices Wong, C.-L. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING Acoustic phonon technique MEMS Network analyzer Resonator SEM 10.1117/12.810798 Proceedings of SPIE - The International Society for Optical Engineering 7268 - PSISD 2014-06-19T03:02:26Z 2014-06-19T03:02:26Z 2008 Conference Paper Wong, C.-L.,Palaniapan, M. (2008). Characterization techniques for NEMS/MEMS devices. Proceedings of SPIE - The International Society for Optical Engineering 7268 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1117/12.810798" target="_blank">https://doi.org/10.1117/12.810798</a> 0277786X http://scholarbank.nus.edu.sg/handle/10635/69593 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Acoustic phonon technique MEMS Network analyzer Resonator SEM |
| spellingShingle |
Acoustic phonon technique MEMS Network analyzer Resonator SEM Wong, C.-L. Palaniapan, M. Characterization techniques for NEMS/MEMS devices |
| description |
10.1117/12.810798 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Wong, C.-L. Palaniapan, M. |
| format |
Conference or Workshop Item |
| author |
Wong, C.-L. Palaniapan, M. |
| author_sort |
Wong, C.-L. |
| title |
Characterization techniques for NEMS/MEMS devices |
| title_short |
Characterization techniques for NEMS/MEMS devices |
| title_full |
Characterization techniques for NEMS/MEMS devices |
| title_fullStr |
Characterization techniques for NEMS/MEMS devices |
| title_full_unstemmed |
Characterization techniques for NEMS/MEMS devices |
| title_sort |
characterization techniques for nems/mems devices |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/69593 |
| _version_ |
1821213759125848064 |