Characterization techniques for NEMS/MEMS devices

10.1117/12.810798

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Bibliographic Details
Main Authors:	Wong, C.-L., Palaniapan, M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Acoustic phonon technique MEMS Network analyzer Resonator SEM
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69593
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Institution:	National University of Singapore

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