Control and signal processing for photoresist processing in microlithography
10.1109/IECON.2002.1185495
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2014
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sg-nus-scholar.10635-697232015-01-16T12:43:54Z Control and signal processing for photoresist processing in microlithography Tay, A. Ho, W.K. Lim, K.W. Loh, A.P. Tan, W.W. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IECON.2002.1185495 IECON Proceedings (Industrial Electronics Conference) 2 1468-1473 IEPRE 2014-06-19T03:03:55Z 2014-06-19T03:03:55Z 2002 Conference Paper Tay, A.,Ho, W.K.,Lim, K.W.,Loh, A.P.,Tan, W.W. (2002). Control and signal processing for photoresist processing in microlithography. IECON Proceedings (Industrial Electronics Conference) 2 : 1468-1473. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IECON.2002.1185495" target="_blank">https://doi.org/10.1109/IECON.2002.1185495</a> http://scholarbank.nus.edu.sg/handle/10635/69723 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
10.1109/IECON.2002.1185495 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.K. Lim, K.W. Loh, A.P. Tan, W.W. |
| format |
Conference or Workshop Item |
| author |
Tay, A. Ho, W.K. Lim, K.W. Loh, A.P. Tan, W.W. |
| spellingShingle |
Tay, A. Ho, W.K. Lim, K.W. Loh, A.P. Tan, W.W. Control and signal processing for photoresist processing in microlithography |
| author_sort |
Tay, A. |
| title |
Control and signal processing for photoresist processing in microlithography |
| title_short |
Control and signal processing for photoresist processing in microlithography |
| title_full |
Control and signal processing for photoresist processing in microlithography |
| title_fullStr |
Control and signal processing for photoresist processing in microlithography |
| title_full_unstemmed |
Control and signal processing for photoresist processing in microlithography |
| title_sort |
control and signal processing for photoresist processing in microlithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/69723 |
| _version_ |
1681087065905692672 |