Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees
Materials Research Society Symposium - Proceedings
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2014
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sg-nus-scholar.10635-702432015-02-11T01:44:21Z Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Wei, F. Yu, B. Hau-Riege, S.P. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 716 431-438 MRSPD 2014-06-19T03:09:52Z 2014-06-19T03:09:52Z 2002 Conference Paper Gan, C.L.,Thompson, C.V.,Pey, K.L.,Choi, W.K.,Wei, F.,Yu, B.,Hau-Riege, S.P. (2002). Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees. Materials Research Society Symposium - Proceedings 716 : 431-438. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/70243 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Materials Research Society Symposium - Proceedings |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Wei, F. Yu, B. Hau-Riege, S.P. |
| format |
Conference or Workshop Item |
| author |
Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Wei, F. Yu, B. Hau-Riege, S.P. |
| spellingShingle |
Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Wei, F. Yu, B. Hau-Riege, S.P. Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees |
| author_sort |
Gan, C.L. |
| title |
Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees |
| title_short |
Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees |
| title_full |
Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees |
| title_fullStr |
Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees |
| title_full_unstemmed |
Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees |
| title_sort |
experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70243 |
| _version_ |
1681087163179991040 |