III-V MOSFETs with a new self-aligned contact

• Main Authors: Zhang, X., Guo, H., Ko, C.-H., Wann, C.H., Cheng, C.-C., Lin, H.-Y., Chin, H.-C., Gong, X., Lim, P.S.Y., Luo, G.-L., Chang, C.-Y., Chien, C.-H., Han, Z.-Y., Huang, S.-C., Yeo., Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/70519
• Institution: National University of Singapore

10.1109/VLSIT.2010.5556240