Monitoring and control of photoresist properties and CD during photoresist processing

Proceedings of SPIE - The International Society for Optical Engineering

Saved in:

Bibliographic Details
Main Authors:	Yang, G., Ngo, Y.-S., Putra, A.S., Ang, K.-T., Tay, A., Fang, Z.-P.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Photoresist processing real-time control temperature control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71016
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-71016
record_format	dspace
spelling	sg-nus-scholar.10635-710162024-11-14T02:32:21Z Monitoring and control of photoresist properties and CD during photoresist processing Yang, G. Ngo, Y.-S. Putra, A.S. Ang, K.-T. Tay, A. Fang, Z.-P. ELECTRICAL & COMPUTER ENGINEERING DEAN'S OFFICE (ENGINEERING) Photoresist processing real-time control temperature control Proceedings of SPIE - The International Society for Optical Engineering 7638 - PSISD 2014-06-19T03:18:54Z 2014-06-19T03:18:54Z 2010 Conference Paper Yang, G., Ngo, Y.-S., Putra, A.S., Ang, K.-T., Tay, A., Fang, Z.-P. (2010). Monitoring and control of photoresist properties and CD during photoresist processing. Proceedings of SPIE - The International Society for Optical Engineering 7638 : -. ScholarBank@NUS Repository. 9780819480521 0277786X http://scholarbank.nus.edu.sg/handle/10635/71016 000285046100072 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Photoresist processing real-time control temperature control
spellingShingle	Photoresist processing real-time control temperature control Yang, G. Ngo, Y.-S. Putra, A.S. Ang, K.-T. Tay, A. Fang, Z.-P. Monitoring and control of photoresist properties and CD during photoresist processing
description	Proceedings of SPIE - The International Society for Optical Engineering
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yang, G. Ngo, Y.-S. Putra, A.S. Ang, K.-T. Tay, A. Fang, Z.-P.
format	Conference or Workshop Item
author	Yang, G. Ngo, Y.-S. Putra, A.S. Ang, K.-T. Tay, A. Fang, Z.-P.
author_sort	Yang, G.
title	Monitoring and control of photoresist properties and CD during photoresist processing
title_short	Monitoring and control of photoresist properties and CD during photoresist processing
title_full	Monitoring and control of photoresist properties and CD during photoresist processing
title_fullStr	Monitoring and control of photoresist properties and CD during photoresist processing
title_full_unstemmed	Monitoring and control of photoresist properties and CD during photoresist processing
title_sort	monitoring and control of photoresist properties and cd during photoresist processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71016
_version_	1821195152530604032

Monitoring and control of photoresist properties and CD during photoresist processing

Similar Items