Non-invasive acoustic phonon characterization of dynamic MEMS

Non-invasive acoustic phonon characterization of dynamic MEMS

Conference Proceedings from the International Symposium for Testing and Failure Analysis

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Bibliographic Details
Main Authors: Wong, W.K., Palaniapan, M., Wong, C.L., Wang, S.R., Tay, F.E.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71150
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Institution: National University of Singapore
Description
Summary:Conference Proceedings from the International Symposium for Testing and Failure Analysis

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