Non-invasive acoustic phonon characterization of dynamic MEMS

Conference Proceedings from the International Symposium for Testing and Failure Analysis

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Main Authors:	Wong, W.K., Palaniapan, M., Wong, C.L., Wang, S.R., Tay, F.E.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71150
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71150
record_format	dspace
spelling	sg-nus-scholar.10635-711502015-02-09T00:09:12Z Non-invasive acoustic phonon characterization of dynamic MEMS Wong, W.K. Palaniapan, M. Wong, C.L. Wang, S.R. Tay, F.E.H. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Conference Proceedings from the International Symposium for Testing and Failure Analysis 2006 6-12 2014-06-19T03:20:24Z 2014-06-19T03:20:24Z 2006 Conference Paper Wong, W.K.,Palaniapan, M.,Wong, C.L.,Wang, S.R.,Tay, F.E.H. (2006). Non-invasive acoustic phonon characterization of dynamic MEMS. Conference Proceedings from the International Symposium for Testing and Failure Analysis 2006 : 6-12. ScholarBank@NUS Repository. 0871708442 http://scholarbank.nus.edu.sg/handle/10635/71150 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Conference Proceedings from the International Symposium for Testing and Failure Analysis
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wong, W.K. Palaniapan, M. Wong, C.L. Wang, S.R. Tay, F.E.H.
format	Conference or Workshop Item
author	Wong, W.K. Palaniapan, M. Wong, C.L. Wang, S.R. Tay, F.E.H.
spellingShingle	Wong, W.K. Palaniapan, M. Wong, C.L. Wang, S.R. Tay, F.E.H. Non-invasive acoustic phonon characterization of dynamic MEMS
author_sort	Wong, W.K.
title	Non-invasive acoustic phonon characterization of dynamic MEMS
title_short	Non-invasive acoustic phonon characterization of dynamic MEMS
title_full	Non-invasive acoustic phonon characterization of dynamic MEMS
title_fullStr	Non-invasive acoustic phonon characterization of dynamic MEMS
title_full_unstemmed	Non-invasive acoustic phonon characterization of dynamic MEMS
title_sort	non-invasive acoustic phonon characterization of dynamic mems
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71150
_version_	1681087331127263232

Non-invasive acoustic phonon characterization of dynamic MEMS

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