Process method to suppress the effect of phase errors in alternating phase shift masks

Process method to suppress the effect of phase errors in alternating phase shift masks

10.1116/1.1885012

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Bibliographic Details
Main Authors: Singh, N., Roy, M.M., Mehta, S.S., Adeyeye, A.O.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71511
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Institution: National University of Singapore
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Summary:10.1116/1.1885012

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