Process method to suppress the effect of phase errors in alternating phase shift masks

10.1116/1.1885012

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Bibliographic Details
Main Authors:	Singh, N., Roy, M.M., Mehta, S.S., Adeyeye, A.O.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71511
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71511
record_format	dspace
spelling	sg-nus-scholar.10635-715112023-10-30T09:02:15Z Process method to suppress the effect of phase errors in alternating phase shift masks Singh, N. Roy, M.M. Mehta, S.S. Adeyeye, A.O. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1885012 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 2 540-546 JVTBD 2014-06-19T03:24:33Z 2014-06-19T03:24:33Z 2005 Conference Paper Singh, N., Roy, M.M., Mehta, S.S., Adeyeye, A.O. (2005). Process method to suppress the effect of phase errors in alternating phase shift masks. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (2) : 540-546. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1885012 10711023 http://scholarbank.nus.edu.sg/handle/10635/71511 000228788600033 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.1885012
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Singh, N. Roy, M.M. Mehta, S.S. Adeyeye, A.O.
format	Conference or Workshop Item
author	Singh, N. Roy, M.M. Mehta, S.S. Adeyeye, A.O.
spellingShingle	Singh, N. Roy, M.M. Mehta, S.S. Adeyeye, A.O. Process method to suppress the effect of phase errors in alternating phase shift masks
author_sort	Singh, N.
title	Process method to suppress the effect of phase errors in alternating phase shift masks
title_short	Process method to suppress the effect of phase errors in alternating phase shift masks
title_full	Process method to suppress the effect of phase errors in alternating phase shift masks
title_fullStr	Process method to suppress the effect of phase errors in alternating phase shift masks
title_full_unstemmed	Process method to suppress the effect of phase errors in alternating phase shift masks
title_sort	process method to suppress the effect of phase errors in alternating phase shift masks
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71511
_version_	1781783207344078848

Process method to suppress the effect of phase errors in alternating phase shift masks

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