Real-time estimation and control of photoresist properties in microlithography
10.1109/CCA.2007.4389313
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2014
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sg-nus-scholar.10635-715642015-03-31T16:46:02Z Real-time estimation and control of photoresist properties in microlithography Wu, X. Tay, A. Ho, W.K. Tan, K.K. ELECTRICAL & COMPUTER ENGINEERING 10.1109/CCA.2007.4389313 Proceedings of the IEEE International Conference on Control Applications 694-699 2014-06-19T03:25:09Z 2014-06-19T03:25:09Z 2007 Conference Paper Wu, X.,Tay, A.,Ho, W.K.,Tan, K.K. (2007). Real-time estimation and control of photoresist properties in microlithography. Proceedings of the IEEE International Conference on Control Applications : 694-699. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/CCA.2007.4389313" target="_blank">https://doi.org/10.1109/CCA.2007.4389313</a> 1424404436 http://scholarbank.nus.edu.sg/handle/10635/71564 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
10.1109/CCA.2007.4389313 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Wu, X. Tay, A. Ho, W.K. Tan, K.K. |
| format |
Conference or Workshop Item |
| author |
Wu, X. Tay, A. Ho, W.K. Tan, K.K. |
| spellingShingle |
Wu, X. Tay, A. Ho, W.K. Tan, K.K. Real-time estimation and control of photoresist properties in microlithography |
| author_sort |
Wu, X. |
| title |
Real-time estimation and control of photoresist properties in microlithography |
| title_short |
Real-time estimation and control of photoresist properties in microlithography |
| title_full |
Real-time estimation and control of photoresist properties in microlithography |
| title_fullStr |
Real-time estimation and control of photoresist properties in microlithography |
| title_full_unstemmed |
Real-time estimation and control of photoresist properties in microlithography |
| title_sort |
real-time estimation and control of photoresist properties in microlithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/71564 |
| _version_ |
1681087406659338240 |