Real-time estimation and control of photoresist properties in microlithography

10.1109/CCA.2007.4389313

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Bibliographic Details
Main Authors:	Wu, X., Tay, A., Ho, W.K., Tan, K.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71564
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Institution:	National University of Singapore

Description
Summary:	10.1109/CCA.2007.4389313

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