Application of Single Contact Optical Beam Induced Currents (SCOBIC) for Backside Failure Analysis

Conference Proceedings from the International Symposium for Testing and Failure Analysis

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Bibliographic Details
Main Authors: Palaniappan, M., Chin, J.M., Phang, J.C.H., Chan, D.S.H., Soh, C.E., Gilfeather, G.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/72492
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Institution: National University of Singapore
Description
Summary:Conference Proceedings from the International Symposium for Testing and Failure Analysis