Application of Single Contact Optical Beam Induced Currents (SCOBIC) for Backside Failure Analysis
Conference Proceedings from the International Symposium for Testing and Failure Analysis
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Main Authors: | Palaniappan, M., Chin, J.M., Phang, J.C.H., Chan, D.S.H., Soh, C.E., Gilfeather, G. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/72492 |
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Institution: | National University of Singapore |
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