Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Chang, W.Y., Feng, Z.C., Chua, S.J., Lin, J.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/72700
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Institution: National University of Singapore
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Summary:Proceedings of SPIE - The International Society for Optical Engineering