Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate

Proceedings of SPIE - The International Society for Optical Engineering

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Main Authors:	Chang, W.Y., Feng, Z.C., Chua, S.J., Lin, J.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/72700
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-72700
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spelling	sg-nus-scholar.10635-727002015-02-24T16:38:14Z Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate Chang, W.Y. Feng, Z.C. Chua, S.J. Lin, J. PHYSICS ELECTRICAL ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 4078 203-210 PSISD 2014-06-19T05:11:01Z 2014-06-19T05:11:01Z 2000 Conference Paper Chang, W.Y.,Feng, Z.C.,Chua, S.J.,Lin, J. (2000). Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate. Proceedings of SPIE - The International Society for Optical Engineering 4078 : 203-210. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/72700 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of SPIE - The International Society for Optical Engineering
author2	PHYSICS
author_facet	PHYSICS Chang, W.Y. Feng, Z.C. Chua, S.J. Lin, J.
format	Conference or Workshop Item
author	Chang, W.Y. Feng, Z.C. Chua, S.J. Lin, J.
spellingShingle	Chang, W.Y. Feng, Z.C. Chua, S.J. Lin, J. Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate
author_sort	Chang, W.Y.
title	Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate
title_short	Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate
title_full	Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate
title_fullStr	Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate
title_full_unstemmed	Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate
title_sort	infrared reflectance study of chemical vapor deposition grown 3c-silicon carbide on silicon substrate
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/72700
_version_	1681087613403922432

Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate

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