A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging

A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging

10.1109/PGC.2010.5705982

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Bibliographic Details
Main Authors: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.Q., Kwong, D.L.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73037
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Institution: National University of Singapore
id sg-nus-scholar.10635-73037
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spelling sg-nus-scholar.10635-730372015-03-23T19:52:58Z A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging Zhang, Q.X. Du, Y. Tan, C.W. Zhang, J. Yu, M.B. Lo, G.Q. Kwong, D.L. MECHANICAL ENGINEERING 10.1109/PGC.2010.5705982 2010 Photonics Global Conference, PGC 2010 - 2014-06-19T05:30:26Z 2014-06-19T05:30:26Z 2010 Conference Paper Zhang, Q.X.,Du, Y.,Tan, C.W.,Zhang, J.,Yu, M.B.,Lo, G.Q.,Kwong, D.L. (2010). A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging. 2010 Photonics Global Conference, PGC 2010 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/PGC.2010.5705982" target="_blank">https://doi.org/10.1109/PGC.2010.5705982</a> 9781424498826 http://scholarbank.nus.edu.sg/handle/10635/73037 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1109/PGC.2010.5705982
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Zhang, Q.X.
Du, Y.
Tan, C.W.
Zhang, J.
Yu, M.B.
Lo, G.Q.
Kwong, D.L.
format Conference or Workshop Item
author Zhang, Q.X.
Du, Y.
Tan, C.W.
Zhang, J.
Yu, M.B.
Lo, G.Q.
Kwong, D.L.
spellingShingle Zhang, Q.X.
Du, Y.
Tan, C.W.
Zhang, J.
Yu, M.B.
Lo, G.Q.
Kwong, D.L.
A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging
author_sort Zhang, Q.X.
title A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging
title_short A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging
title_full A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging
title_fullStr A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging
title_full_unstemmed A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging
title_sort mems platform for 2-d fine-positioning and locking of optical ball-lens in silicon photonics packaging
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73037
_version_ 1681087674631323648

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