A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging
10.1109/PGC.2010.5705982
Saved in:
Main Authors: | Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.Q., Kwong, D.L. |
---|---|
Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73037 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
by: Zhang, Q.X., et al.
Published: (2014) -
A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging
by: Zhang, Q.X., et al.
Published: (2014) -
A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
by: Zhang, Q.X., et al.
Published: (2014) -
A MEMS-based compliant interconnect for ultra-fine-pitch wafer level packaging
by: Liao, E.B., et al.
Published: (2014) -
Integrated circuit ceramic ball grid array package antenna
by: Zhang, Yue Ping
Published: (2009)