A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging

• Main Authors: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.Q., Kwong, D.L.
• 其他作者: MECHANICAL ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/73037
• 機構: National University of Singapore

10.1109/PGC.2010.5705982