Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology
10.1117/12.458264
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2014
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sg-nus-scholar.10635-732472023-10-31T07:35:47Z Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology Tan, S.K. Lin, Q. Tay, C.J. Quan, C. MECHANICAL ENGINEERING 0.12 um Assist Features MEEF Phase-shift mask Scattering Bars 10.1117/12.458264 Proceedings of SPIE - The International Society for Optical Engineering 4562 II 1000-1007 PSISD 2014-06-19T05:32:52Z 2014-06-19T05:32:52Z 2001 Conference Paper Tan, S.K., Lin, Q., Tay, C.J., Quan, C. (2001). Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology. Proceedings of SPIE - The International Society for Optical Engineering 4562 II : 1000-1007. ScholarBank@NUS Repository. https://doi.org/10.1117/12.458264 0277786X http://scholarbank.nus.edu.sg/handle/10635/73247 000176368800104 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
0.12 um Assist Features MEEF Phase-shift mask Scattering Bars |
| spellingShingle |
0.12 um Assist Features MEEF Phase-shift mask Scattering Bars Tan, S.K. Lin, Q. Tay, C.J. Quan, C. Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology |
| description |
10.1117/12.458264 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tan, S.K. Lin, Q. Tay, C.J. Quan, C. |
| format |
Conference or Workshop Item |
| author |
Tan, S.K. Lin, Q. Tay, C.J. Quan, C. |
| author_sort |
Tan, S.K. |
| title |
Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology |
| title_short |
Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology |
| title_full |
Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology |
| title_fullStr |
Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology |
| title_full_unstemmed |
Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology |
| title_sort |
characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73247 |
| _version_ |
1781783292455944192 |