Impact of transmission error for attenuated phase shift mask for 0.10 um Technology

Impact of transmission error for attenuated phase shift mask for 0.10 um Technology

10.1117/12.474485

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Bibliographic Details
Main Authors: Tan, S.K., Lin, Q., Quan, C., Tay, C.J.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
0.10 um
Assist features
Phase-shift mask
Transmission Error
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73524
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Institution: National University of Singapore
Description
Summary:10.1117/12.474485

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