Impact of transmission error for attenuated phase shift mask for 0.10 um Technology
10.1117/12.474485
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2014
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sg-nus-scholar.10635-735242023-10-29T22:50:26Z Impact of transmission error for attenuated phase shift mask for 0.10 um Technology Tan, S.K. Lin, Q. Quan, C. Tay, C.J. MECHANICAL ENGINEERING 0.10 um Assist features Phase-shift mask Transmission Error 10.1117/12.474485 Proceedings of SPIE - The International Society for Optical Engineering 4691 II 1062-1069 PSISD 2014-06-19T05:36:09Z 2014-06-19T05:36:09Z 2002 Conference Paper Tan, S.K., Lin, Q., Quan, C., Tay, C.J. (2002). Impact of transmission error for attenuated phase shift mask for 0.10 um Technology. Proceedings of SPIE - The International Society for Optical Engineering 4691 II : 1062-1069. ScholarBank@NUS Repository. https://doi.org/10.1117/12.474485 0277786X http://scholarbank.nus.edu.sg/handle/10635/73524 000178104200103 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| topic |
0.10 um Assist features Phase-shift mask Transmission Error |
| spellingShingle |
0.10 um Assist features Phase-shift mask Transmission Error Tan, S.K. Lin, Q. Quan, C. Tay, C.J. Impact of transmission error for attenuated phase shift mask for 0.10 um Technology |
| description |
10.1117/12.474485 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tan, S.K. Lin, Q. Quan, C. Tay, C.J. |
| format |
Conference or Workshop Item |
| author |
Tan, S.K. Lin, Q. Quan, C. Tay, C.J. |
| author_sort |
Tan, S.K. |
| title |
Impact of transmission error for attenuated phase shift mask for 0.10 um Technology |
| title_short |
Impact of transmission error for attenuated phase shift mask for 0.10 um Technology |
| title_full |
Impact of transmission error for attenuated phase shift mask for 0.10 um Technology |
| title_fullStr |
Impact of transmission error for attenuated phase shift mask for 0.10 um Technology |
| title_full_unstemmed |
Impact of transmission error for attenuated phase shift mask for 0.10 um Technology |
| title_sort |
impact of transmission error for attenuated phase shift mask for 0.10 um technology |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73524 |
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1781783314532663296 |