Line end shortening and corner rounding for novel off-axis illumination source shapes

• Main Authors: Ling, M.L., Chua, G.S., Lin, Q., Tay, C.J., Quan, C.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Corner rounding; Double dipole; Double quadrupole; Line end shortening; Off-axis illumination
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73574
• Institution: National University of Singapore

10.1117/12.814057