Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon

Transactions of the North American Manufacturing Research Institute of SME

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Bibliographic Details
Main Authors:	Arefin, S., Li, X.P., Rahman, M., He, T.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Cutting Edge Radius Ductile Mode Cutting Silicon Wafer Subsurface Damage
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73579
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73579
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spelling	sg-nus-scholar.10635-735792015-01-06T10:50:32Z Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon Arefin, S. Li, X.P. Rahman, M. He, T. MECHANICAL ENGINEERING Cutting Edge Radius Ductile Mode Cutting Silicon Wafer Subsurface Damage Transactions of the North American Manufacturing Research Institute of SME 33 113-119 2014-06-19T05:36:50Z 2014-06-19T05:36:50Z 2005 Conference Paper Arefin, S.,Li, X.P.,Rahman, M.,He, T. (2005). Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon. Transactions of the North American Manufacturing Research Institute of SME 33 : 113-119. ScholarBank@NUS Repository. 10473025 http://scholarbank.nus.edu.sg/handle/10635/73579 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Cutting Edge Radius Ductile Mode Cutting Silicon Wafer Subsurface Damage
spellingShingle	Cutting Edge Radius Ductile Mode Cutting Silicon Wafer Subsurface Damage Arefin, S. Li, X.P. Rahman, M. He, T. Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon
description	Transactions of the North American Manufacturing Research Institute of SME
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Arefin, S. Li, X.P. Rahman, M. He, T.
format	Conference or Workshop Item
author	Arefin, S. Li, X.P. Rahman, M. He, T.
author_sort	Arefin, S.
title	Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon
title_short	Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon
title_full	Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon
title_fullStr	Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon
title_full_unstemmed	Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon
title_sort	machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73579
_version_	1681087774011162624

Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon

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