Micromachined III-V multimorph actuator model and design using Simulated Annealing (SA)-based global optimization

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

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Bibliographic Details
Main Authors: Ongkodjojo, A., Tay, F.E.H., Akkipeddi, R.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73610
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Institution: National University of Singapore
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Summary:2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004