Micromachined III-V multimorph actuator model and design using Simulated Annealing (SA)-based global optimization

• Main Authors: Ongkodjojo, A., Tay, F.E.H., Akkipeddi, R.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: AlAs/GaAs; Global optimization; III-V multimorph; MOEMS; Simulated Annealing (SA)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73610
• Institution: National University of Singapore

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004