Nanometric ductile cutting characteristics of silicon wafer using single crystal diamond tools

10.1116/1.3071855

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Bibliographic Details
Main Authors: Liu, K., Zuo, D., Li, X.P., Rahman, M.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73669
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Institution: National University of Singapore