Optical scanning with MEMS in-plane vibratory gratings and its applications

10.1109/OMEMS.2010.5672205

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Bibliographic Details
Main Authors: Zhou, G., Du, Y., Cheo, K.K.L., Yu, H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73719
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Institution: National University of Singapore
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Summary:10.1109/OMEMS.2010.5672205