Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates

Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates

10.1007/s00542-013-1740-0

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Bibliographic Details
Main Authors: Lau, K.H., Giridhar, A., Harikrishnan, S., Satyanarayana, N., Sinha, S.K.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73810
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Institution: National University of Singapore
Description
Summary:10.1007/s00542-013-1740-0

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