Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates

• Main Authors: Lau, K.H., Giridhar, A., Harikrishnan, S., Satyanarayana, N., Sinha, S.K.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73810
• Institution: National University of Singapore

10.1007/s00542-013-1740-0