Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
10.1007/s00542-013-1740-0
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Main Authors: | Lau, K.H., Giridhar, A., Harikrishnan, S., Satyanarayana, N., Sinha, S.K. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73810 |
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Institution: | National University of Singapore |
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