Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates

10.1007/s00542-013-1740-0

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Bibliographic Details
Main Authors:	Lau, K.H., Giridhar, A., Harikrishnan, S., Satyanarayana, N., Sinha, S.K.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73810
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73810
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spelling	sg-nus-scholar.10635-738102024-11-11T18:21:05Z Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates Lau, K.H. Giridhar, A. Harikrishnan, S. Satyanarayana, N. Sinha, S.K. MECHANICAL ENGINEERING 10.1007/s00542-013-1740-0 Microsystem Technologies 19 11 1863-1871 2014-06-19T05:39:36Z 2014-06-19T05:39:36Z 2013-11 Conference Paper Lau, K.H., Giridhar, A., Harikrishnan, S., Satyanarayana, N., Sinha, S.K. (2013-11). Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates. Microsystem Technologies 19 (11) : 1863-1871. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-013-1740-0 09467076 http://scholarbank.nus.edu.sg/handle/10635/73810 000326106800023 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-013-1740-0
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Lau, K.H. Giridhar, A. Harikrishnan, S. Satyanarayana, N. Sinha, S.K.
format	Conference or Workshop Item
author	Lau, K.H. Giridhar, A. Harikrishnan, S. Satyanarayana, N. Sinha, S.K.
spellingShingle	Lau, K.H. Giridhar, A. Harikrishnan, S. Satyanarayana, N. Sinha, S.K. Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
author_sort	Lau, K.H.
title	Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
title_short	Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
title_full	Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
title_fullStr	Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
title_full_unstemmed	Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
title_sort	releasing high aspect ratio su-8 microstructures using az photoresist as a sacrificial layer on metallized si substrates
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73810
_version_	1821223916120571904

Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates

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