Sub-0.10 μm Lithography technology with resolution enhancement technique

Sub-0.10 μm Lithography technology with resolution enhancement technique

10.1117/12.474544

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Bibliographic Details
Main Authors: Chua, G.S., Lin, Q., Tay, C.J., Quan, C.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Assist features
Depth of focus
Optical proximity correction
Resolution enhancement technique
Scattering bars
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73892
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Institution: National University of Singapore
id sg-nus-scholar.10635-73892
record_format dspace
spelling sg-nus-scholar.10635-738922023-10-27T07:08:20Z Sub-0.10 μm Lithography technology with resolution enhancement technique Chua, G.S. Lin, Q. Tay, C.J. Quan, C. MECHANICAL ENGINEERING Assist features Depth of focus Optical proximity correction Resolution enhancement technique Scattering bars 10.1117/12.474544 Proceedings of SPIE - The International Society for Optical Engineering 4691 II 1563-1574 PSISD 2014-06-19T05:40:36Z 2014-06-19T05:40:36Z 2002 Conference Paper Chua, G.S., Lin, Q., Tay, C.J., Quan, C. (2002). Sub-0.10 μm Lithography technology with resolution enhancement technique. Proceedings of SPIE - The International Society for Optical Engineering 4691 II : 1563-1574. ScholarBank@NUS Repository. https://doi.org/10.1117/12.474544 0277786X http://scholarbank.nus.edu.sg/handle/10635/73892 000178104200156 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Assist features
Depth of focus
Optical proximity correction
Resolution enhancement technique
Scattering bars
spellingShingle Assist features
Depth of focus
Optical proximity correction
Resolution enhancement technique
Scattering bars
Chua, G.S.
Lin, Q.
Tay, C.J.
Quan, C.
Sub-0.10 μm Lithography technology with resolution enhancement technique
description 10.1117/12.474544
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Chua, G.S.
Lin, Q.
Tay, C.J.
Quan, C.
format Conference or Workshop Item
author Chua, G.S.
Lin, Q.
Tay, C.J.
Quan, C.
author_sort Chua, G.S.
title Sub-0.10 μm Lithography technology with resolution enhancement technique
title_short Sub-0.10 μm Lithography technology with resolution enhancement technique
title_full Sub-0.10 μm Lithography technology with resolution enhancement technique
title_fullStr Sub-0.10 μm Lithography technology with resolution enhancement technique
title_full_unstemmed Sub-0.10 μm Lithography technology with resolution enhancement technique
title_sort sub-0.10 μm lithography technology with resolution enhancement technique
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73892
_version_ 1781783346316050432

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