Synchronized laser scanning of multiple beams by MEMS gratings integrated with resonant frequency fine tuning mechanisms

Synchronized laser scanning of multiple beams by MEMS gratings integrated with resonant frequency fine tuning mechanisms

10.1109/OMEMS.2010.5672175

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73902
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Institution: National University of Singapore
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