Test structures for new MEMS sensors and devices

Test structures for new MEMS sensors and devices

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Tay Eng Hock, F., Koon Hwee, T.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73923
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Institution: National University of Singapore
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Summary:Proceedings of SPIE - The International Society for Optical Engineering

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