Test structures for new MEMS sensors and devices
Proceedings of SPIE - The International Society for Optical Engineering
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73923 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-73923 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-739232015-02-05T14:32:09Z Test structures for new MEMS sensors and devices Tay Eng Hock, F. Koon Hwee, T. MECHANICAL ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 4746 I 504-513 PSISD 2014-06-19T05:41:00Z 2014-06-19T05:41:00Z 2002 Conference Paper Tay Eng Hock, F.,Koon Hwee, T. (2002). Test structures for new MEMS sensors and devices. Proceedings of SPIE - The International Society for Optical Engineering 4746 I : 504-513. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/73923 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Proceedings of SPIE - The International Society for Optical Engineering |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tay Eng Hock, F. Koon Hwee, T. |
| format |
Conference or Workshop Item |
| author |
Tay Eng Hock, F. Koon Hwee, T. |
| spellingShingle |
Tay Eng Hock, F. Koon Hwee, T. Test structures for new MEMS sensors and devices |
| author_sort |
Tay Eng Hock, F. |
| title |
Test structures for new MEMS sensors and devices |
| title_short |
Test structures for new MEMS sensors and devices |
| title_full |
Test structures for new MEMS sensors and devices |
| title_fullStr |
Test structures for new MEMS sensors and devices |
| title_full_unstemmed |
Test structures for new MEMS sensors and devices |
| title_sort |
test structures for new mems sensors and devices |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73923 |
| _version_ |
1681087836114124800 |