Test structures for new MEMS sensors and devices
Proceedings of SPIE - The International Society for Optical Engineering
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Main Authors: | Tay Eng Hock, F., Koon Hwee, T. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73923 |
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Institution: | National University of Singapore |
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