Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices

• Main Authors: Pandey, A.K., Pratap, R., Chau, F.S.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Computational fluid dynamics (CFD); Experimental quality factor; Microelectromechanical system (MEMS); Partially blocked boundaries; Squeeze-film damping; Torsional motion
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/60522
• Institution: National University of Singapore

10.1109/JMEMS.2007.901135