Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime

Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime

Proceedings of the Society for Experimental Mechanics, Inc.

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Bibliographic Details
Main Authors: Pandey, A.K., Pratap, R., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Subjects:
Experimental result
MEMS
Microfluidics
Quality factor
Squeeze-film damping
Torsion motion
Online Access:http://scholarbank.nus.edu.sg/handle/10635/114553
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/114553

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