Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime
Proceedings of the Society for Experimental Mechanics, Inc.
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sg-nus-scholar.10635-1145532021-10-25T15:07:03Z Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime Pandey, A.K. Pratap, R. Chau, F.S. MECHANICAL ENGINEERING Experimental result MEMS Microfluidics Quality factor Squeeze-film damping Torsion motion Proceedings of the Society for Experimental Mechanics, Inc. 65 91-106 2014-12-02T08:05:58Z 2014-12-02T08:05:58Z 2008 Pandey, A.K., Pratap, R., Chau, F.S. (2008). Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime. Proceedings of the Society for Experimental Mechanics, Inc. 65 : 91-106. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/114553 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Experimental result MEMS Microfluidics Quality factor Squeeze-film damping Torsion motion |
| spellingShingle |
Experimental result MEMS Microfluidics Quality factor Squeeze-film damping Torsion motion Pandey, A.K. Pratap, R. Chau, F.S. Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
| description |
Proceedings of the Society for Experimental Mechanics, Inc. |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Pandey, A.K. Pratap, R. Chau, F.S. |
| author |
Pandey, A.K. Pratap, R. Chau, F.S. |
| author_sort |
Pandey, A.K. |
| title |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
| title_short |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
| title_full |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
| title_fullStr |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
| title_full_unstemmed |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
| title_sort |
effect of pressure on fluid damping in mems torsional resonators with flow ranging from continuum to molecular regime |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/114553 |
| _version_ |
1715199510407282688 |