Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures

Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures

10.1016/j.sna.2006.09.006

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Bibliographic Details
Main Authors: Pandey, A.K., Pratap, R., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Analytical results
Perforations
Reynolds equation
Squeeze-film damping
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59536
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/59536

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