Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures

10.1016/j.sna.2006.09.006

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Bibliographic Details
Main Authors:	Pandey, A.K., Pratap, R., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Analytical results Perforations Reynolds equation Squeeze-film damping
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59536
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-59536
record_format	dspace
spelling	sg-nus-scholar.10635-595362024-11-14T17:55:11Z Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures Pandey, A.K. Pratap, R. Chau, F.S. MECHANICAL ENGINEERING Analytical results Perforations Reynolds equation Squeeze-film damping 10.1016/j.sna.2006.09.006 Sensors and Actuators, A: Physical 135 2 839-848 SAAPE 2014-06-17T06:12:36Z 2014-06-17T06:12:36Z 2007-04-15 Article Pandey, A.K., Pratap, R., Chau, F.S. (2007-04-15). Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures. Sensors and Actuators, A: Physical 135 (2) : 839-848. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2006.09.006 09244247 http://scholarbank.nus.edu.sg/handle/10635/59536 000246193700067 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Analytical results Perforations Reynolds equation Squeeze-film damping
spellingShingle	Analytical results Perforations Reynolds equation Squeeze-film damping Pandey, A.K. Pratap, R. Chau, F.S. Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures
description	10.1016/j.sna.2006.09.006
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Pandey, A.K. Pratap, R. Chau, F.S.
format	Article
author	Pandey, A.K. Pratap, R. Chau, F.S.
author_sort	Pandey, A.K.
title	Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures
title_short	Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures
title_full	Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures
title_fullStr	Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures
title_full_unstemmed	Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures
title_sort	analytical solution of the modified reynolds equation for squeeze film damping in perforated mems structures
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/59536
_version_	1821182712522735616

Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures

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