Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime

Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime

10.1007/s11340-007-9076-2

Saved in:
Bibliographic Details
Main Authors: Pandey, A.K., Pratap, R., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Experimental result
MEMS
Microfluidics
Quality factor
Squeeze-film damping
Torsion motion
Online Access:http://scholarbank.nus.edu.sg/handle/10635/114498
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/114498

Similar Items