Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime

10.1007/s11340-007-9076-2

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Main Authors: Pandey, A.K., Pratap, R., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/114498
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spelling sg-nus-scholar.10635-1144982023-10-30T20:49:48Z Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime Pandey, A.K. Pratap, R. Chau, F.S. MECHANICAL ENGINEERING Experimental result MEMS Microfluidics Quality factor Squeeze-film damping Torsion motion 10.1007/s11340-007-9076-2 Experimental Mechanics 48 1 91-106 EXMCA 2014-12-02T08:05:27Z 2014-12-02T08:05:27Z 2008-02 Article Pandey, A.K., Pratap, R., Chau, F.S. (2008-02). Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime. Experimental Mechanics 48 (1) : 91-106. ScholarBank@NUS Repository. https://doi.org/10.1007/s11340-007-9076-2 00144851 http://scholarbank.nus.edu.sg/handle/10635/114498 000252277300008 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Experimental result
MEMS
Microfluidics
Quality factor
Squeeze-film damping
Torsion motion
spellingShingle Experimental result
MEMS
Microfluidics
Quality factor
Squeeze-film damping
Torsion motion
Pandey, A.K.
Pratap, R.
Chau, F.S.
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime
description 10.1007/s11340-007-9076-2
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Pandey, A.K.
Pratap, R.
Chau, F.S.
format Article
author Pandey, A.K.
Pratap, R.
Chau, F.S.
author_sort Pandey, A.K.
title Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime
title_short Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime
title_full Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime
title_fullStr Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime
title_full_unstemmed Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime
title_sort effect of pressure on fluid damping in mems torsional resonators with flow ranging from continuum to molecular regime
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/114498
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