Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime
10.1007/s11340-007-9076-2
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sg-nus-scholar.10635-1144982023-10-30T20:49:48Z Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime Pandey, A.K. Pratap, R. Chau, F.S. MECHANICAL ENGINEERING Experimental result MEMS Microfluidics Quality factor Squeeze-film damping Torsion motion 10.1007/s11340-007-9076-2 Experimental Mechanics 48 1 91-106 EXMCA 2014-12-02T08:05:27Z 2014-12-02T08:05:27Z 2008-02 Article Pandey, A.K., Pratap, R., Chau, F.S. (2008-02). Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime. Experimental Mechanics 48 (1) : 91-106. ScholarBank@NUS Repository. https://doi.org/10.1007/s11340-007-9076-2 00144851 http://scholarbank.nus.edu.sg/handle/10635/114498 000252277300008 Scopus |
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Experimental result MEMS Microfluidics Quality factor Squeeze-film damping Torsion motion |
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Experimental result MEMS Microfluidics Quality factor Squeeze-film damping Torsion motion Pandey, A.K. Pratap, R. Chau, F.S. Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
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10.1007/s11340-007-9076-2 |
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MECHANICAL ENGINEERING |
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MECHANICAL ENGINEERING Pandey, A.K. Pratap, R. Chau, F.S. |
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Article |
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Pandey, A.K. Pratap, R. Chau, F.S. |
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Pandey, A.K. |
title |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
title_short |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
title_full |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
title_fullStr |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
title_full_unstemmed |
Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime |
title_sort |
effect of pressure on fluid damping in mems torsional resonators with flow ranging from continuum to molecular regime |
publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/114498 |
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1781789288748285952 |