Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices
10.1109/JMEMS.2007.901135
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sg-nus-scholar.10635-605222024-11-14T17:55:11Z Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices Pandey, A.K. Pratap, R. Chau, F.S. MECHANICAL ENGINEERING Computational fluid dynamics (CFD) Experimental quality factor Microelectromechanical system (MEMS) Partially blocked boundaries Squeeze-film damping Torsional motion 10.1109/JMEMS.2007.901135 Journal of Microelectromechanical Systems 16 4 893-903 JMIYE 2014-06-17T06:24:14Z 2014-06-17T06:24:14Z 2007-08 Article Pandey, A.K., Pratap, R., Chau, F.S. (2007-08). Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices. Journal of Microelectromechanical Systems 16 (4) : 893-903. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2007.901135 10577157 http://scholarbank.nus.edu.sg/handle/10635/60522 000248578700014 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| topic |
Computational fluid dynamics (CFD) Experimental quality factor Microelectromechanical system (MEMS) Partially blocked boundaries Squeeze-film damping Torsional motion |
| spellingShingle |
Computational fluid dynamics (CFD) Experimental quality factor Microelectromechanical system (MEMS) Partially blocked boundaries Squeeze-film damping Torsional motion Pandey, A.K. Pratap, R. Chau, F.S. Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices |
| description |
10.1109/JMEMS.2007.901135 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Pandey, A.K. Pratap, R. Chau, F.S. |
| format |
Article |
| author |
Pandey, A.K. Pratap, R. Chau, F.S. |
| author_sort |
Pandey, A.K. |
| title |
Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices |
| title_short |
Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices |
| title_full |
Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices |
| title_fullStr |
Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices |
| title_full_unstemmed |
Influence of boundary conditions on the dynamic characteristics of squeeze films in MEMS devices |
| title_sort |
influence of boundary conditions on the dynamic characteristics of squeeze films in mems devices |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60522 |
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1821182500107452416 |