Two masks process for high aspect ratio inertial sensors with ajustable range

Two masks process for high aspect ratio inertial sensors with ajustable range

Proceedings of the International Semiconductor Conference, CAS

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Bibliographic Details
Main Authors: Iliescu, C., Avram, M., Miao, J., Tay, F.E.H., Xu, G.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Anodic bonding
Comb drive
High aspect ratio
Inertial sensors with adjustable range
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73986
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Institution: National University of Singapore
Description
Summary:Proceedings of the International Semiconductor Conference, CAS

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