Two masks process for high aspect ratio inertial sensors with ajustable range

• Main Authors: Iliescu, C., Avram, M., Miao, J., Tay, F.E.H., Xu, G.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Anodic bonding; Comb drive; High aspect ratio; Inertial sensors with adjustable range
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73986
• Institution: National University of Singapore

Proceedings of the International Semiconductor Conference, CAS